説明
-8inch (Open Cassette) -F Probe(27.9kΩ/sq, 279.4Ω/sq, 2.794Ω/sq） -Galil Motion Controller -I7 Computer -Dual Probe Arm: P1 / P2 -LP1: 200mm OCA+ -LP2: 200mm OCA+ -RS SW: 10.0.0.6構成
-Measurement range: > 5 mΩ/sq. to < 5 MΩ/sq -Measurement repeatability, based on KLA-Tencor’s “Probe Qualification Test” @ 1” test diameter, using the appropriate probe head: < 0.2% (1σ) -Reproducibility: Representative metals (e.g. Cu, W, TiN) < 0.5% (1σ) -Edge exclusion: From the conductive film edge for the following the probe heads: 25 mil pitch -1 mm with “enhanced” probe position 25 mil pitch -3 mm with “standard” probe position 40 mil pitch -4 mm with “standard” probe position 62.5 mil pitch -5 mm with “standard” probe position -Temperature measurement accuracy: ± 0.5°C -Temperature measurement repeatability: ± 0.2°C -Throughput: based on 5-site test with wafer alignment, fixed current and temperature compensation. 200 mm Single SMIF: ≥ 110 WPH -Measurement Capabilities Routine check: 1-30 sites programmable (ASTM standard tests included) XY maps and flexible, user-defined patterns: up to 1,200 sites programmable -Analysis Capabilities Contour/3-D map: 49, 81, 121, 225, 361, 441, 625 sites Diameter scan: 49, 81, 121, 225, 361, 441, 625 sites Probe qualification test: 20 sites Trend charts Recipe editing and data extraction capability Average, difference and ratio maps Temperature coefficient of resistance correctionOEMモデルの説明
Sheet Resistance Measurement Systems The OmniMap® RS-200 resistivity mapping system, based on proven industry resistivity mapping standards, provides accurate and reliable sheet resistance measurement for 45nm and beyond. This resistivity mapping system provides capabilities such as advanced automation and improved edge performance to meet today's 300mm wafer production requirements.ドキュメント
KLA
OmniMap RS200+
検証済み
カテゴリ
Resistivity / Four Point Probe
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
111610
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KLA
OmniMap RS200+
カテゴリ
Resistivity / Four Point Probe
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
111610
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available