説明
1.MU board fail 2. sensor head fail 3.power supply構成
構成なしOEMモデルの説明
The OmniMap RS75 is a four-point probe series that offers precise sheet resistance measurements for monitor wafers. It is faster than existing systems and is suitable for a variety of semiconductor process monitoring applications, including ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP, and bulk silicon. The system can process over 100 wafers per hour when conducting a five-site test on 200 mm wafers, with temperature compensation and flat alignment. A 49-site contour map with temperature compensation can be completed on a manually loaded test wafer in less than sixty seconds. This makes the OmniMap RS75 a production-worthy tool for sheet resistance mapping.ドキュメント
ドキュメントなし
検証済み
カテゴリ
Resistivity / Four Point Probe
最終検証： 17日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
142658
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
KLA
OmniMap RS75
カテゴリ
Resistivity / Four Point Probe
最終検証： 17日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
142658
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
1.MU board fail 2. sensor head fail 3.power supply構成
構成なしOEMモデルの説明
The OmniMap RS75 is a four-point probe series that offers precise sheet resistance measurements for monitor wafers. It is faster than existing systems and is suitable for a variety of semiconductor process monitoring applications, including ion implantation, metal deposition, CMP, diffusion, polysilicon, epi, RTP, and bulk silicon. The system can process over 100 wafers per hour when conducting a five-site test on 200 mm wafers, with temperature compensation and flat alignment. A 49-site contour map with temperature compensation can be completed on a manually loaded test wafer in less than sixty seconds. This makes the OmniMap RS75 a production-worthy tool for sheet resistance mapping.ドキュメント
ドキュメントなし