説明

Pellicle Mounting System

構成

· Used in mask production line. · Tool consists of; a pressure-controlled flow bench chamber, an automated SMIF POD factory interface, a toolbox unit, a reticle gripper assembly, and a control panel. · A pressure-controlled flow bench chamber: Consists of FFUs to facilitated steady stated down flow stream accompanied by grated flooring at the toolbox level. Exhaust unit enables recirculation of the air back to FFU. · Automated SMIF POD factory interface: Facilitates reticle transfer to toolbox unit for studs demount treatment. · Toolbox unit consists of; a top cover, four stud demount units (with ability to move along Y and Z axis), four heater block assembly (to modulate epoxy curing time). This is the main unit where facilitates studs demount treatment. · Reticle gripper assembly: Is used to transfer reticles to toolbox unit and back to SMIF POD factory interface. · Control panel: Facilitates software interface to navigate through studs demount sequences (start/end process). · SRT-100 is a semi-automated tool, where an operator performs reticle movement to toolbox prior to studs demount treatment. Operator then sends demount command through control panel to initiate the process.