説明
Reticle Inspection構成
· Factory Interface (FI) with 1 load port for SMIF pod RSP-200 · Imaging optics o Laser scan microscopy using 405nm semiconductor laser as light source. o Particle detection using PMT. o Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available. o Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload. o Dual optical path allowing mask scan on both chrome and glass side without flipping. · Minimum defect size scanning capability: o 0.1um and above for chrome blanks o 0.15um and above for glass side o >90% capture repeatability at detection limitOEMモデルの説明
提供なしドキュメント
ドキュメントなし
同様のリスト
すべて表示
HORIBA
PR-PD2
カテゴリ
Reticle / Mask Inspection
最終検証： 3日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
155084
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Reticle Inspection構成
· Factory Interface (FI) with 1 load port for SMIF pod RSP-200 · Imaging optics o Laser scan microscopy using 405nm semiconductor laser as light source. o Particle detection using PMT. o Particle observation mode with white LED light source and 2 million pixel CCD. 1-8x digital zoom available. o Average inspection time for 132mm x 132mm area is ≤ 7min including load and unload. o Dual optical path allowing mask scan on both chrome and glass side without flipping. · Minimum defect size scanning capability: o 0.1um and above for chrome blanks o 0.15um and above for glass side o >90% capture repeatability at detection limitOEMモデルの説明
提供なしドキュメント
ドキュメントなし