説明

Reticle Inspection

構成

· Model: L12755 · Mask Size: 152mm · Main body: composed of the auto loader section which loads the mask, pod, and/or inner base, the stage section which scans the mask and measures the inner base reflectivity, and the controller section which controls the overall system. · Two Ports: o Port 1- This is the place where the pod is set. When performing auto processing, the pod containing the mask is set here o Port 2 - This is the place where the pod is set. When performing auto processing, the pod which does not contain the mask is set here · Flippers: This mechanism flips and rotates the mask · FFU (Fan Filter Unit): Discharges clean air for creating a clean environment · Types of Pods: o Dual pod types - Dual pod with standard base plate and pellicle capable base plate o RSP types - Entegris PEEK pod, Gudeng PEEK pod and Entegris ABS pod · Software Overview - software operates on Windows and is used to execute mask transfer, scan, macro view, and inner base reflectivity measurement by the system main body · Communication connection /Processing: o ONLINE REMOTE - The series of mask transfer, scan, and height measurement is all performed automatically based on control from the host side o ONLINE LOCAL - A communication connection with the host has been established, and mask transfer, scan, height measurement, etc. are executed by operations from the system side. o OFFLINE - Communications with the host are disconnected, and mask transfer, scan, height measurement, etc. are executed by operations from the system side. · Consumable - xenon lamp with 3000hours time for replacement