The SEMILAB FAAST 350 is a Mask & Wafer Inspection tool designed to provide fast, non-contact monitoring of heavy metal contamination, including the detection of sub 108 atoms/cm-3 Fe. It features automated wafer handling from dual FOUP loadport loading stations and is fully capable of supporting high-volume manufacturing environments. This tool is world-leading in its ability to quickly and accurately monitor heavy metal contamination in wafers, making it an essential tool for ensuring the quality and reliability of semiconductor products.

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FAAST 350

The SEMILAB FAaST 200 SL is a Wafer Mask Inspection system. The FAaST 200 SL can produce wafer size of 8” and Measurements can be made in scribe line test sites or in the active cell area. Cell measurements allow for the first time in-line electrical monitoring of topology related processing issues

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トップSEMILAB Reticle / Mask Inspection

FAAST 350

FAAST 200 SL

FAAST 210E-SPV

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すべてのSEMILAB Reticle / Mask Inspection