概要（Overview）

The SEMILAB FAAST 350 is a Mask & Wafer Inspection tool designed to provide fast, non-contact monitoring of heavy metal contamination, including the detection of sub 108 atoms/cm-3 Fe. It features automated wafer handling from dual FOUP loadport loading stations and is fully capable of supporting high-volume manufacturing environments. This tool is world-leading in its ability to quickly and accurately monitor heavy metal contamination in wafers, making it an essential tool for ensuring the quality and reliability of semiconductor products.