説明
Poly Etch構成
TCP9408SE Software Version Envision 1.6 - 012A CIM SECS Process CMOS Hardware Confguration Main System: LAM TCP 9400 ETCHER (1) Factory Interface: SMIF (2) AC Rack (1) PC Pump (1) TCU 4080 (1) LL PUMP (1) Heater Controller (1)OEMモデルの説明
The TCP 9400SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400SE is used for polysilicon and polycide etch applications. It operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates with independent power control to the lower electrode, which improves etch results across a wider process window. Lam’s TCP systems are designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The TCP systems are available as stand-alone, single wafer tools, or on the Alliance multichamber cluster platform.ドキュメント
ドキュメントなし
LAM RESEARCH CORPORATION
TCP 9400SE
検証済み
カテゴリ
RIE
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
91876
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1993
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示LAM RESEARCH CORPORATION
TCP 9400SE
検証済み
カテゴリ
RIE
最終検証: 2日前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
91876
ウェーハサイズ:
8"/200mm
ヴィンテージ:
1993
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Poly Etch構成
TCP9408SE Software Version Envision 1.6 - 012A CIM SECS Process CMOS Hardware Confguration Main System: LAM TCP 9400 ETCHER (1) Factory Interface: SMIF (2) AC Rack (1) PC Pump (1) TCU 4080 (1) LL PUMP (1) Heater Controller (1)OEMモデルの説明
The TCP 9400SE is a high density, low pressure etch system from Lam’s TCP product line. It incorporates the Company’s patented Transformer Coupled Plasma source technology for etching 0.35 micron and smaller geometries. The TCP 9400SE is used for polysilicon and polycide etch applications. It operates at lower pressures for improved pattern transfer control and higher plasma density for higher etch rates with independent power control to the lower electrode, which improves etch results across a wider process window. Lam’s TCP systems are designed to offer customers a reliable, lower cost of ownership solution to their advanced needs. The TCP systems are available as stand-alone, single wafer tools, or on the Alliance multichamber cluster platform.ドキュメント
ドキュメントなし