CENTURA 5200 HTF
概要(Overview)
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.
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4
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検査、保証、鑑定、ロジスティクス
The Centura architecture clusters four processing stations and two auxiliary chambers around a central transfer module containing an ultra-reliable magnetically-coupled vacuum robot.
4
検査、保証、鑑定、ロジスティクス