ALLWIN21 / AG ASSOCIATES AccuThermo AW820R

説明

The AccuThermo AW820R is production-proven stand alone automatic atmospheric RTP (Rapid Thermal Processing) system, which uses high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures. The process periods are typically 1-900 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities combined with the heating chamber's cold-wall design and superior heating uniformity provide significant advantages over conventional furnace processing. The AccuThermo AW820R comes with an integrated solid robotic wafer transfer instead of the old robot & controller system.

構成

構成なし

OEMモデルの説明

AccuThermo AW820R is production-proven stand alone automatic atmospheric RTP (Rapid Thermal Processing) system, which uses high intensity visible radiation to heat single wafer for short process periods of time at precisely controlled temperatures. The process periods are typically 1-900 seconds in duration, although periods of up to 9999 seconds can be selected. These capabilities, combined with the heating chamber's cold-wall design and superior heating uniformity, provide significant advantages over conventional furnace processing.