説明
ALLWIN21 / AG ASSOCIATES HEATPULSE 410 RTA System is fully functional, tray configured for 100mm wafers. This unit was used on silicon and GaAs wafers with various metals such as AL, Au, Ti, Ni and others. Also, various thin films, SiN SiO2. Advanced Upgraded AG Heatpulse 410 key features include: Manual Operation Closed-loop temperature control with pyrometer or thermocouple temperature sensing. Precise time-temperature profiles tailored to suit specific process requirements. High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies. Consistent wafer-to-wafer process cycle repeatability. Elimination of external contamination. Small footprint and energy efficiency. Software calibration and easy to be done. More functions and I/O hardware “exposed” for easier maintenance and trouble shooting. It is easy to edit recipe with GUI and graph display. Save all process data on the computer hard disk. A/D and D/A precision is 14 to 16 bits. Detect in process and with color curve displayed on the screen. Lamp damage detect in process. Software watch dog to eliminate machine damage duo to the computer locks up or freeze. Sensor status detect function. On line help function構成
AG Associates Heatpulse 410 RTA, refurbished by Allwin21 Corp (significantly upgraded controls compared to original AG heatpulse) The computer OS is Windows XPOEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
124431
ウェーハサイズ：
4"/100mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ALLWIN21 / AG ASSOCIATES
HEATPULSE 410
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Installed / Running
製品ID：
124431
ウェーハサイズ：
4"/100mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
ALLWIN21 / AG ASSOCIATES HEATPULSE 410 RTA System is fully functional, tray configured for 100mm wafers. This unit was used on silicon and GaAs wafers with various metals such as AL, Au, Ti, Ni and others. Also, various thin films, SiN SiO2. Advanced Upgraded AG Heatpulse 410 key features include: Manual Operation Closed-loop temperature control with pyrometer or thermocouple temperature sensing. Precise time-temperature profiles tailored to suit specific process requirements. High-intensity visible radiation heats wafers for short periods. Fast heating and cooling rates unobtainable in conventional technologies. Consistent wafer-to-wafer process cycle repeatability. Elimination of external contamination. Small footprint and energy efficiency. Software calibration and easy to be done. More functions and I/O hardware “exposed” for easier maintenance and trouble shooting. It is easy to edit recipe with GUI and graph display. Save all process data on the computer hard disk. A/D and D/A precision is 14 to 16 bits. Detect in process and with color curve displayed on the screen. Lamp damage detect in process. Software watch dog to eliminate machine damage duo to the computer locks up or freeze. Sensor status detect function. On line help function構成
AG Associates Heatpulse 410 RTA, refurbished by Allwin21 Corp (significantly upgraded controls compared to original AG heatpulse) The computer OS is Windows XPOEMモデルの説明
提供なしドキュメント
ドキュメントなし