説明
Lamp annealer構成
構成なしOEMモデルの説明
The Centura RTP XE is a Rapid Thermal Processing system introduced in 1997. It features improved productivity, higher throughput, and reduced power consumption. It also includes the TempMatchTM temperature calibration tool for precise temperature matching among multiple chambers and systems. New applications include In-Situ Steam Generation, Nitric Oxide nitridation for gate dielectrics, and BPSG reflow capability. The system is available for both 200mm and 300mm applications, delivering process uniformity for 0.18mm devices and slip-free results up to 1100°C at a rate of 100°C/sec.ドキュメント
ドキュメントなし
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
130672
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
APPLIED MATERIALS (AMAT)
CENTURA RTP XE
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
130672
ウェーハサイズ：
8"/200mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Lamp annealer構成
構成なしOEMモデルの説明
The Centura RTP XE is a Rapid Thermal Processing system introduced in 1997. It features improved productivity, higher throughput, and reduced power consumption. It also includes the TempMatchTM temperature calibration tool for precise temperature matching among multiple chambers and systems. New applications include In-Situ Steam Generation, Nitric Oxide nitridation for gate dielectrics, and BPSG reflow capability. The system is available for both 200mm and 300mm applications, delivering process uniformity for 0.18mm devices and slip-free results up to 1100°C at a rate of 100°C/sec.ドキュメント
ドキュメントなし