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説明
説明なし構成
jipelec jetfirst Rapid Thermal Processor (RTP) - Max. 4 inches diameter Si Wafer. - Ramp rate 100 °C/sec max. - Vacuum = 10-2 mbar max. - Thermocouple, TC = 20 °C to 1000 °C readable. - Pyrometer = 400 °C to 1300 °C readable - Max. operating Temp. = 1200 °COEMモデルの説明
The Jetfirst RTP system was developed to meet university and research laboratory requirements. The temperature control system provides accurate and repeatable thermal control across the temperature range. The lamp array, upper flange, and quarts window are mounted in a rotating top lid, giving full access to the chamber for easy loading and unloading of the wafer.ドキュメント
ドキュメントなし
jipelec
JETFIRST
カテゴリ
RTP/RTA
最終検証： 60日以上前
Buyer pays 12% premium of final sale price
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
56624
ウェーハサイズ：
不明
ヴィンテージ：
不明
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説明
説明なし構成
jipelec jetfirst Rapid Thermal Processor (RTP) - Max. 4 inches diameter Si Wafer. - Ramp rate 100 °C/sec max. - Vacuum = 10-2 mbar max. - Thermocouple, TC = 20 °C to 1000 °C readable. - Pyrometer = 400 °C to 1300 °C readable - Max. operating Temp. = 1200 °COEMモデルの説明
The Jetfirst RTP system was developed to meet university and research laboratory requirements. The temperature control system provides accurate and repeatable thermal control across the temperature range. The lamp array, upper flange, and quarts window are mounted in a rotating top lid, giving full access to the chamber for easy loading and unloading of the wafer.ドキュメント
ドキュメントなし