説明
Tool was custom designed and built by Kurt Lesker構成
Key Features • Chamber accommodates 8” (200mm) wafers • Designed to be compatible with cluster tools. • Vacuum system: designed for Ultra High Vacuum (7x10-7 Torr). • Main: Pfeiffer 790L/s Turbomolecular pump with VAT • Load lock: Pfeiffer 67 L/s turbo pump • Roughing pump: Edwards NXDS10I Mechanical scroll pump • Control software and interlocks • Automated heavy duty linear transfer arm • Multiple ports and windows • Multiple gas inlets • Large central port for induction or other feedthrough • High frequency induction heating power source available (Ambrell 6kW)OEMモデルの説明
提供なしドキュメント
カテゴリ
RTP/RTA
最終検証： 昨日
主なアイテムの詳細
状態：
New
稼働ステータス:
Deinstalled / Uncrated
製品ID：
147197
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
KURT J LESKER
CUSTOM
カテゴリ
RTP/RTA
最終検証： 昨日
主なアイテムの詳細
状態：
New
稼働ステータス:
Deinstalled / Uncrated
製品ID：
147197
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2022
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available