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説明
Missing: Robot Aligner Oxygen sensor Water flow sensors Pneumatic Rack Analog Converter for Thermocouple Blower 2 Power Supply Air distributor Faulty CPU Sequencer (main computer to run the software and communicate with facility components)構成
Spare High quality (original packed parts) Quartzware Included: Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Side Panel (closed) Qty: 3 Upper Quartz plate / edge Qty: 3 U,Q,P static with ring tilt Qty: 1 Gas Distributor Qty: 8 Linear Plate Qty: 2 Plate for Rotor 8inch Qty: 1 Rotor 12inch Qty: 1 Rotor 8inch Qty: 2 Deflection frame for ring tilt Qty: 1 Air bearing Qty: 4 Ring segment carrier (8inch) static Qty: 1 Facility documents GEM Hardware-Installation Check-Out Operation Parts Guide Process Info RTP AST3000 Service Service-Tools Supplementary Wiring (all circuit diagrams for each individual component)OEMモデルの説明
The 3000 RTP system is the advanced generation RTP tool available with dual side heating to minimize pattern induced thermal non-uniformity and to achieve fast ramp rates of up to 250(degrees)C per second. The 3000 RTP system can be configured for both 200 mm and 300 mm wafers and its applications include ultra-shallow junction formation, implant annealing, cobalt silicide formation and oxinitride formation.ドキュメント
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
59880
ウェーハサイズ：
8"/200mm, 12"/300mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
MATTSON / STEAG / AST
3000
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
59880
ウェーハサイズ：
8"/200mm, 12"/300mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available