The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.

A supplier of advanced process equipment used to manufacture semiconductors, announced the successful completion to the merger between Mattson Technology, the semiconductor equipment division of STEAG Electronic Systems AG and CFM Technologies, Inc. 

In March 1999, STEAG acquired AG Associates, Inc. and combined its operations with the former AST Elektronik, which it acquired in 1996, to form STEAG RTP Systems. AG Associates was the first company to introduce products utilizing rapid thermal processing technology.

MATTSON / STEAG / AST

2800

-Description: AST SUPER HEAT SYSTEM
-Software Version: DOS 2.0
-CIM: GEM
-Process: RTP
-Handler System: PRI ROBOT ATM307 (1) 
-Handler System: PRI ALIGNER (1) 
-Factory Interface: NONE

2800

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