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2800

カテゴリ
RTP/RTA
概要(Overview)

The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.

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検査、保証、鑑定、ロジスティクス

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