説明

Asset Description AST SUPER HEAT SYSTEM Software Version Window NT CIM GEM Process AST SUPER HEAT SYSTEM Asset Description AST SUPER HEAT SYSTEM Software Version Window NT CIM GEM Process AST SUPER HEAT SYSTEM System Type Description Quantity Handler System ROBOT 1 Factory Interface NONE Options System Handler System PREALIGNER 1 Main System MAIN TOOL 1 Handler System INDEXER 2200 2 Others Excluded Items List (Pumps, Chillers & Abatement are all excluded)

構成

構成なし

OEMモデルの説明

The 2800 RTP system is the STEAG Semiconductor Division's workhorse for mainstream applications. Over 500 have been installed worldwide. Applications include silicide/barrier formation, BPSG reflow and densification, shallow junction formation, thin gate dielectrics, thermal donor annihilation and multilayer annealing.