説明
AG Associates Heatpulse rapid thermal processor構成
構成なしOEMモデルの説明
The Heatpulse 8800i and 8108i enable chipmakers to achieve significant savings in facility costs by combining the RTP system and Asyst's SMIF-Enclosure mini-environment into one integrated system, thereby reducing total system footprint, while increasing overall fab cleanliness. The Heatpulse 8800i and 8108i utilize the company's patented cross lamp oven and individual zone control to generate temperature uniformity. Both systems address the parameters for process repeatability, slip-free processing, and contamination control.ドキュメント
ドキュメントなし
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
126237
ウェーハサイズ：
不明
ヴィンテージ：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
METRON / AG ASSOCIATES
HEATPULSE 8800i
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
126237
ウェーハサイズ：
不明
ヴィンテージ：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
AG Associates Heatpulse rapid thermal processor構成
構成なしOEMモデルの説明
The Heatpulse 8800i and 8108i enable chipmakers to achieve significant savings in facility costs by combining the RTP system and Asyst's SMIF-Enclosure mini-environment into one integrated system, thereby reducing total system footprint, while increasing overall fab cleanliness. The Heatpulse 8800i and 8108i utilize the company's patented cross lamp oven and individual zone control to generate temperature uniformity. Both systems address the parameters for process repeatability, slip-free processing, and contamination control.ドキュメント
ドキュメントなし