説明
説明なし構成
Comprises of: -Main frame -IBM Thinkcentre PC with Intel Pentium CPU The system was configured for use with 2 x 200 mm open cassettes -single arm PRI/Equip ATM robot (Missing) -2 x 8 inch wafer cassette plates -BROOKS AUTOMATION pre-aligner (Missing) -Internal NESLAB CHILLER -Relay panel PCB -N2 PURGE gas supply line fitted with Unit MFC N2 20 slm MFC and SISPAN analog pressure indicator. -Gas Line 1 fitted with Unit MFC O2 10 slm MFC and SISPAN analog pressure indicator. -Gas line 2 fitted with Unit MFC NH3 10 slm MFC and SISPAN analog pressure indicator. -Gas Line 3 fitted with Unit MFC O2 1 slm MFC and SISPAN analog pressure indicator. -Gas line 4 fitted with Unit MFC Ar 10 slm MFC and SISPAN analog pressure indicator. -Input electrical power requirements: 200V 60 HZ 3 PHASE MAX AMPS PER PHASE: 86 MAX LAMP CURRENT PER PHASE: 78 AOEMモデルの説明
Rapid Thermal Processor The AG Associates Heatpulse 8108 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambients. The system is built for the production environment.ドキュメント
ドキュメントなし
METRON / AG ASSOCIATES
HEATPULSE 8108
検証済み
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
77923
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1996
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
METRON / AG ASSOCIATES
HEATPULSE 8108
カテゴリ
RTP/RTA
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
77923
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1996
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
Comprises of: -Main frame -IBM Thinkcentre PC with Intel Pentium CPU The system was configured for use with 2 x 200 mm open cassettes -single arm PRI/Equip ATM robot (Missing) -2 x 8 inch wafer cassette plates -BROOKS AUTOMATION pre-aligner (Missing) -Internal NESLAB CHILLER -Relay panel PCB -N2 PURGE gas supply line fitted with Unit MFC N2 20 slm MFC and SISPAN analog pressure indicator. -Gas Line 1 fitted with Unit MFC O2 10 slm MFC and SISPAN analog pressure indicator. -Gas line 2 fitted with Unit MFC NH3 10 slm MFC and SISPAN analog pressure indicator. -Gas Line 3 fitted with Unit MFC O2 1 slm MFC and SISPAN analog pressure indicator. -Gas line 4 fitted with Unit MFC Ar 10 slm MFC and SISPAN analog pressure indicator. -Input electrical power requirements: 200V 60 HZ 3 PHASE MAX AMPS PER PHASE: 86 MAX LAMP CURRENT PER PHASE: 78 AOEMモデルの説明
Rapid Thermal Processor The AG Associates Heatpulse 8108 system is a single-wafer, cassette-to-cassette rapid thermal processor, capable of processing in inert or corrosive ambients. The system is built for the production environment.ドキュメント
ドキュメントなし