説明
Operational. Complete with the exception of quartzware.構成
構成なしOEMモデルの説明
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.ドキュメント
ドキュメントなし
MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
検証済み
カテゴリ
RTP/RTA
最終検証： 8日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
116664
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
MODULAR PROCESS TECHNOLOGY / MPTC
RTP-600S
カテゴリ
RTP/RTA
最終検証： 8日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
116664
ウェーハサイズ：
6"/150mm
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Operational. Complete with the exception of quartzware.構成
構成なしOEMモデルの説明
Modular process technology RTP-600S Rapid Thermal Processing System. The integrated process control system features real time graphics, recipe management, data acquisition and has a comprehensive diagnostic function. Wafer size up to 6 in. Temp Range 250 to 1300 deg C (I wouldn't take it that high, maybe 1100C for short times). Quartz chamber (not included). Up to six channels of MFC control (Equipped with 3 channels). Highly uniform loop array with accurate control and monitoring. 208V, 3Ph, 60Hz, 80A.ドキュメント
ドキュメントなし