説明
The Hitachi SCDS is designed for processing PFC gases used in semiconductor fabrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6. The Hitachi SCDS offers superior cost of ownership versus Capture/Re-cycle; Combustion; or Chemical Conversion technologies since it uses little electricity, only 1 gpm of water, and has a catalyst lifetime of more than 4,600 hours. The SCDS-60 has a footprint of only 37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし
HITACHI
SCDS CD-60
検証済み
カテゴリ
Scrubbers - Process Gases
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
43476
ウェーハサイズ：
不明
ヴィンテージ：
2000
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
HITACHI
SCDS CD-60
カテゴリ
Scrubbers - Process Gases
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
43476
ウェーハサイズ：
不明
ヴィンテージ：
2000
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
The Hitachi SCDS is designed for processing PFC gases used in semiconductor fabrication. The system features a 60l/min gas throughput and decomposition rates of over 99.4% for CF4, C2F6, CHF3, C3F8, C4F8, NF3, CO and SF6. The Hitachi SCDS offers superior cost of ownership versus Capture/Re-cycle; Combustion; or Chemical Conversion technologies since it uses little electricity, only 1 gpm of water, and has a catalyst lifetime of more than 4,600 hours. The SCDS-60 has a footprint of only 37" Wx19.5 " Dx77"H. and is fully S2-93 and CE compliant.構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし