概要（Overview）

The Quanta 200 is a type of scanning electron microscope (SEM) that was once manufactured by FEI. This versatile instrument can be used in both high-vacuum and low-vacuum modes, allowing for the imaging of a wide range of samples. The electron beam in the Quanta 200 is produced by a traditional tungsten filament electron source, which can resolve features as small as 3 nm under ideal conditions. The instrument is equipped with standard Secondary Electron (SE) and Back Scatter Electron (BSE) detectors, as well as an Energy Dispersive X-ray Analysis (EDS) detector and an internal TV camera. Some of the Quanta 200’s features include SE, BSE, and EDS detectors; an accelerating voltage range of 200 V to 30 kV; a resolution of 3.0 nm at 30 kV; and a resolution of 10 nm at 3 kV.