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説明
SEM構成
SEM, Large Sample Chamber (maximum 300mm diameter), 5-axis MD, Camera Navigation, Secondary/Reflection Electrons, Low Vacuum Secondary Electron Detector ESED-II, EDX HORIBA EMAX Evolution X Max50 EX470OEMモデルの説明
S-3700N is designed as a new series of Tungsten-type VP-SEM to accommodate sample diameters up to 300mm using a new large specimen chamber and a large specimen stage. Moreover, simultaneous accommodations of accessory attachments for EDX, WDX and EBSP (*1) analyses are possible at optimized analytical geometry. The specimen stage has a wide traverse range for observation of sample areas up to 203mm diameter and up to 110mm height with EDX and WDX analysis.ドキュメント
ドキュメントなし
HITACHI
S-3700N
カテゴリ
SEM / FIB
最終検証： 30日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
116067
ウェーハサイズ：
不明
ヴィンテージ：
2017
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説明
SEM構成
SEM, Large Sample Chamber (maximum 300mm diameter), 5-axis MD, Camera Navigation, Secondary/Reflection Electrons, Low Vacuum Secondary Electron Detector ESED-II, EDX HORIBA EMAX Evolution X Max50 EX470OEMモデルの説明
S-3700N is designed as a new series of Tungsten-type VP-SEM to accommodate sample diameters up to 300mm using a new large specimen chamber and a large specimen stage. Moreover, simultaneous accommodations of accessory attachments for EDX, WDX and EBSP (*1) analyses are possible at optimized analytical geometry. The specimen stage has a wide traverse range for observation of sample areas up to 203mm diameter and up to 110mm height with EDX and WDX analysis.ドキュメント
ドキュメントなし