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説明
Hitachi SEM S-4160構成
Performance: Rresolution: 2.5 nm at 30kv Magnification: 20X - 300KX Electron Optics: Electron gun: Cold field emmission source, 0.5 - 30 kV Lens type: electromagnetic Objective aperture: 4 position externally selectable Stigmator: Octopole electromagnetic Scanning coil: 2-stage electromagnetic Sample Chamber Pump: Turbo pumped Stage motion: 5 axis motor driven X/Y: 150 mm, Z: 5-30 mm, T: 0 Deg - +45 Deg., R: 360 deg continuous Display system: Image display: Dual 12" monitors * Option : Changeable into image capture system with LCD Color monitor Vacuum system: Full automatic operation with pneumatic valve control Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber Ion pump: 60 L/s X1, 20 L/s X2 Speciment chamber: DP (570 L/s) Foreline: Rotary pumpOEMモデルの説明
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HITACHI
S-4160
カテゴリ
SEM / FIB
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
22445
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2000
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説明
Hitachi SEM S-4160構成
Performance: Rresolution: 2.5 nm at 30kv Magnification: 20X - 300KX Electron Optics: Electron gun: Cold field emmission source, 0.5 - 30 kV Lens type: electromagnetic Objective aperture: 4 position externally selectable Stigmator: Octopole electromagnetic Scanning coil: 2-stage electromagnetic Sample Chamber Pump: Turbo pumped Stage motion: 5 axis motor driven X/Y: 150 mm, Z: 5-30 mm, T: 0 Deg - +45 Deg., R: 360 deg continuous Display system: Image display: Dual 12" monitors * Option : Changeable into image capture system with LCD Color monitor Vacuum system: Full automatic operation with pneumatic valve control Ultimate vacuum: 10 (-7) Pa in electron gun chamber, 10(-4) Pa in specimen chamber Ion pump: 60 L/s X1, 20 L/s X2 Speciment chamber: DP (570 L/s) Foreline: Rotary pumpOEMモデルの説明
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ドキュメントなし