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説明
Hitachi SEM S-5000 *. Installed in Clean-room構成
*. Image Resolution: - 30KV 0.6nm - 1 KV 2.5nm with a test specimen *.Magnification 20X ~ 300,000X *. Stage Movement X ±3.5 mm,Y ±2 mm,Z ±0.3 mm,Tilt ±15 tilt *. Sample holder Column insert type *. Sample exchange Goniometer type *. Stage drive Drive X/Y/TILT are motor driven, Control Manual control by trackball *. Electron gun Cold field emission source - Accel voltage: 0.5 ~ 30 KV - Lens system 3-stage electromagnetic lens - Objective aperture 4-opennings, selectable & alignable from outside the vacuum *. CRT 12 inch viewing CRT X 2 *. Image processing auto image Brightness control *. Scan speed Viewing TV, 0, 3, 2, 10, 20 s/frame, Recording 40, 80, 160, 320 s/frame *. Vacuum pump IP1 60,IP2 20,IP3 20,TMP 340,Rotary pump 145 *. Dimension 108(w) x 132(d) X 175(h) cm, 1,380kg *. Utility : - Room temp 15℃ ~ 25 ℃, - Room humidity below 60% - Power AC 100, 115V ±10% 50/60Hz, 4KVAOEMモデルの説明
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HITACHI
S-5000
カテゴリ
SEM / FIB
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
55841
ウェーハサイズ：
不明
ヴィンテージ：
1996
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説明
Hitachi SEM S-5000 *. Installed in Clean-room構成
*. Image Resolution: - 30KV 0.6nm - 1 KV 2.5nm with a test specimen *.Magnification 20X ~ 300,000X *. Stage Movement X ±3.5 mm,Y ±2 mm,Z ±0.3 mm,Tilt ±15 tilt *. Sample holder Column insert type *. Sample exchange Goniometer type *. Stage drive Drive X/Y/TILT are motor driven, Control Manual control by trackball *. Electron gun Cold field emission source - Accel voltage: 0.5 ~ 30 KV - Lens system 3-stage electromagnetic lens - Objective aperture 4-opennings, selectable & alignable from outside the vacuum *. CRT 12 inch viewing CRT X 2 *. Image processing auto image Brightness control *. Scan speed Viewing TV, 0, 3, 2, 10, 20 s/frame, Recording 40, 80, 160, 320 s/frame *. Vacuum pump IP1 60,IP2 20,IP3 20,TMP 340,Rotary pump 145 *. Dimension 108(w) x 132(d) X 175(h) cm, 1,380kg *. Utility : - Room temp 15℃ ~ 25 ℃, - Room humidity below 60% - Power AC 100, 115V ±10% 50/60Hz, 4KVAOEMモデルの説明
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