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SU1510
カテゴリ
SEM / FIB概要（Overview）
Same high performance optics as S-3400N Variable Pressure mode as standard Large samples up to 153mm in diameter (observation range 126mm in diameter) Observation and EDS analysis on a sample up to 60mm tall Main unit is only 55 cm wide, operating table can be provided by user. TMP vacuum is standard Resolution: 3.0 nm（30kV,SE,HV), 4.0 nm(30kV,BSE,LV)
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