説明
Dual beam Focused Ion Beam Scanning Electron Microscope (FIB-SEM)構成
Resolution: SEM: 1.0 nm at 15 kV FIB: 5 nm at 40 kV FIB Column: Ga Ion source: >50 nA 2-Stage electro static lens system Octopole electro static lens system Pattern generator system: 4K x 4K SEM Column: Maximum beam current: >30 nA 3-Stage electro magnetic lens reduction system Electro static blanking system SE Power supply Image memory: 2560 x 1920 Vacuum system: Turbo molecular pump Dry pump Ion source chamber Electron gun (2) Buffer tanks Micro-sampling system: 3-Axis motor drive system X Range: 1 mm Y Range: 2 mm Z Range: 2.5 mm Chamber scope: LCD Monitor, 7" Stand IR Camera Power cable AC / DC Adaptor Air compressor N2 Gas leak system Multi-stage control panel Console control unit Power supply unit AC Power distribution Transformer Laser sample height adjust tool Manual sample height adjust tool Interlock function PC Processor: INTEL i7 Flat panel LCD Monitor, 22" Mouse Keyboard Control panel RAM: 16 GB Hard Disk Drive (HDD): 500 GB Does not include EDS Operating system: Windows 7, 64-BitOEMモデルの説明
提供なしドキュメント
ドキュメントなし
HITACHI
NB5000
カテゴリ
SEM / FIB
最終検証： 15日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
138358
ウェーハサイズ：
不明
ヴィンテージ：
2018
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Dual beam Focused Ion Beam Scanning Electron Microscope (FIB-SEM)構成
Resolution: SEM: 1.0 nm at 15 kV FIB: 5 nm at 40 kV FIB Column: Ga Ion source: >50 nA 2-Stage electro static lens system Octopole electro static lens system Pattern generator system: 4K x 4K SEM Column: Maximum beam current: >30 nA 3-Stage electro magnetic lens reduction system Electro static blanking system SE Power supply Image memory: 2560 x 1920 Vacuum system: Turbo molecular pump Dry pump Ion source chamber Electron gun (2) Buffer tanks Micro-sampling system: 3-Axis motor drive system X Range: 1 mm Y Range: 2 mm Z Range: 2.5 mm Chamber scope: LCD Monitor, 7" Stand IR Camera Power cable AC / DC Adaptor Air compressor N2 Gas leak system Multi-stage control panel Console control unit Power supply unit AC Power distribution Transformer Laser sample height adjust tool Manual sample height adjust tool Interlock function PC Processor: INTEL i7 Flat panel LCD Monitor, 22" Mouse Keyboard Control panel RAM: 16 GB Hard Disk Drive (HDD): 500 GB Does not include EDS Operating system: Windows 7, 64-BitOEMモデルの説明
提供なしドキュメント
ドキュメントなし