概要（Overview）

The FEI® Magellan™ 400L system delivers unmatched surface-sensitive imaging performance at sub-nanometer resolution, without compromising the analytical capabilities, sample flexibility or ease of use of a traditional analytical SEM. With sub-nm resolution at voltages from 1 to 30 kV, plus a large tiltable stage for 3-D surface imaging of large or multiple samples, this revolutionary new XHR SEM from FEI lets you see things you’ve never seen before. New and innovative electron-optical elements together with field proven, industry-leading stage technology deliver breathtaking performance and rock-solid reliability.