Thermo Fisher Scientific Inc. (NYSE: TMO), the world leader in serving science, today announced that it has completed its acquisition of FEI Company, Inc. (NASDAQ: FEIC), the leader in high-performance electron microscopy. FEI and Philips joined their technologies in 1993 to create the first DualBeam (FIB/SEM) workstation.

The FEI Strata 201 is a type of Focused Ion Beam (FIB) workstation that is commonly used for tasks such as ion milling, SEM, and nanopatterning. It can be found in the clean room of a nanoscience research center. To operate this tool, one must have knowledge of the basics of ion milling, SEM, and nanopatterning. There are certain limitations and restrictions on its use, for example, one should not put anything “sticky” or anything that can outgas under high vacuum into the tool. The configuration of the tool includes Ion Beam Data: Ga, with a range of 5kv to 30kv and a beam current ranging from 11pA to 11.5nA.

THERMOFISHER SCIENTIFIC / FEI / PHILLIPS

STRATA 201

The FEI Strata 205 is a FIB microscope that employs a gallium liquid metal ion source. The microscope has an accelerating voltage range of 5 kV to 20 kV, a resolution of 7 nm, and a beam current range of 1 pA to 20 nA. The system is equipped with a 5-axis motorized table and a gas injection system for depositing conductors and insulators, as well as etching samples. The FEI Strata 205 also features IntelliTune for automated detection depending on the task, user-friendly automated mapping software, and automated image processing for improved results. 

STRATA 205

Phenom Pharos G2 Desktop FEG-SEM
Tabletop field emission gun scanning electron microscope for high quality imaging across disciplines.

PHENOM PHAROS G2

XL30 ESEM

The FEI Quanta 250 FEG is a scanning electron microscope (SEM) that is equipped with advanced features such as a Schottky field emission gun and an Everhart-Thornley detector for secondary electrons. It delivers ultrahigh resolution imaging and is capable of integrating with EDAX detectors, making it ideal for various fields of study. The Quanta 250 FEG offers several modes of operation, including beam deceleration, scanning transmission electron microscopy (STEM), and energy dispersive X-ray spectroscopy (EDS). It also features a WetSTEM system for imaging truly wet samples.

QUANTA 250

CLM-3D

The FEI Verios 460L is a high-tech field-emission scanning electron microscope (FESEM) that provides ultra-high resolution imaging capabilities. This innovative SEM has a unique design that enables it to achieve ultra-high resolution imaging at low energy levels, even on insulating samples that do not have a conductive coating. The Verios 460L is equipped with a variety of electron detectors, both low and high energy, including a transmission detector and an energy dispersive X-ray spectrometer. This advanced microscope is designed to give researchers the flexibility and capabilities they need to excel in their work.

VERIOS 460L

SIRION 200

XL40

DualBeam™ system for high-resolution, high-contrast imaging and specimen preparation. 

STRATA 800

QUANTA 450

XL 835

Quanta 3D 200i Explore a new world of sub-micron sample preparation, modification and 3D inspection.

QUANTA 3D 200i

QUANTA 400 FEG

NOVA NANOSEM 650

VERSA 3D

VERIOS 5 HP

The new XL40 ESEM features a large chamber, a 150-mm stage, and full ESEM capability, allowing users to analyze failures in larger samples. The system is also the basis of the Mineral Liberation Analyzer, which delivers accurate mineral identification and liberation analysis statistics to assist in ore source evaluation, mineral process circuit design, and plant optimization.

XL40 ESEM

XL40 FEG

VOLUMESCOPE 2

MAGELLAN 400

NOVA NANOSEM 430

CLM-PLUS

NOVA NANOSEM 630

XL20

VERIOS G4 HP

VERIOS G4

VERIOS G4 UC XHR

QUANTA 600

NOVA NanoSEM 200

 The FEI® Magellan™ 400L system delivers unmatched surface-sensitive imaging performance at sub-nanometer resolution, without compromising the analytical capabilities, sample flexibility or ease of use of a traditional analytical SEM. With sub-nm resolution at voltages from 1 to 30 kV, plus a large tiltable stage for 3-D surface imaging of large or multiple samples, this revolutionary new XHR SEM from FEI lets you see things you’ve never seen before. New and innovative electron-optical elements together with field proven, industry-leading stage technology deliver breathtaking performance and rock-solid reliability. 

MAGELLAN 400L

 The FEI Verios 460 is a cutting-edge, ultra-high resolution scanning electron microscope (SEM) designed for use with biological and material samples. Installed in 2014, this microscope has an accelerating voltage range of 1-30 keV and a low voltage range of 350 – 1000 eV, with a probe current range of 0.78 pA – 100 nA. The FEI Verios 460L is a unique SEM that allows for ultra-high resolution imaging at low energy on insulating samples without the need for a conductive coating. It is equipped with a wide array of low and high energy electron detectors, including a transmission detector and an energy dispersive X-ray spectrometer.

VERIOS 460

Desktop SEM with EDS capability for robust, effortless, and versatile elemental and SEM analysis.

PHENOM ProX

The FEI XL30S is a scanning electron microscope (SEM) that is equipped with advanced features such as a Schottky field emission gun and an Everhart-Thornley detector for secondary electrons. It delivers ultrahigh resolution imaging and is capable of integrating with EDAX detectors, making it ideal for various fields of study. The XL30S offers several modes of operation, including beam deceleration, scanning transmission electron microscopy (STEM), and energy dispersive X-ray spectroscopy (EDS). It also features a WetSTEM system for imaging truly wet samples.

XL30S

The FEI Strata 400 STEM is a type of DualBeam™ system that combines the capabilities of a field emission scanning electron microscope (SEM) column with those of a focused ion beam (FIB) column to provide high-resolution, high-contrast imaging and specimen preparation. This system features complete in-situ sample preparation capabilities and high-resolution imaging, allowing TEM samples to be prepared without breaking vacuum. The Strata 400 STEM is specifically designed to meet the growing demand for high-resolution analytical capabilities as device geometries shrink below 100 nm and new materials are introduced. It includes integrated sample lift-out and handling, as well as SEM-STEM (scanning transmission electron microscopy) imaging, enabling high-contrast, high-resolution analysis.

STRATA 400 STEM

INSPECT S50

The FEI Quanta 200 is a high-performance Scanning Electron Microscope (SEM) that is versatile and can accommodate a wide range of samples. It has three modes: high vacuum, low vacuum, and ESEM (Environmental Scanning Electron Microscopy). The Quanta 200 FEGSEM (Field Emission Gun Scanning Electron Microscope) system is optimized for OIM (Orientation Imaging by Electron Backscatter Diffraction) microscopy. The chamber and stage of the Quanta 200 FEG have high tilt capabilities, ranging from -5° to +80°, which enables optimized EBSD (Electron Backscatter Diffraction) analysis.

QUANTA 200 FEG

The NOVA NANOSEM 450 is a type of Scanning Electron Microscope (SEM) that uses a Schottky Field Emission source. It has the ability to operate at both high and low voltages, providing ultra-high resolution imaging. Additionally, it can operate in low-vacuum mode, allowing for high-resolution imaging of samples that may not be suitable for high-vacuum conditions. The instrument is equipped with advanced technologies such as a two-mode final lens, beam deceleration, and environmental SEM capabilities, making it a versatile tool for researchers and developers working with a wide range of nano-materials and devices. It can also be used for e-beam writing with the NPGS Nanopattern Generation System. The Nova NanoSEM 450 is known for its excellent imaging and analytical performance, and its user-friendly design allows for easy switching between different instrument conditions based on the needs of the user. Its strong performance in low vacuum mode makes it particularly useful for obtaining high-quality analytical data on non-conductive materials such as glass or ceramics.

NOVA NANOSEM 450

The Defect Analyzer 300 is an advanced 300 mm DualBeam system designed for in-fab structural diagnostics. It can accommodate either 300 mm or 200 mm wafers and delivers a powerful combination of tool automation, industry-leading electron imaging, unsurpassed focused ion beam milling, and proprietary beam chemistry technology. This enables three-dimensional analysis of advanced process defects, resulting in better control over advanced processes, reduced time-to-market, and drastically reduced process development costs. 

DEFECT ANALYZER 300

For high-brightness, high-current, high-resolution imaging, the Inspect F50 , a SEM equipped with a Schottky Field Emission source, provides clear, sharp and noise-free imaging. In combination with the optimized analytical chamber geometry and its four-axis, motorized tilt, eucentric specimen stage, the high- and stable beam current makes this tool well suited for (automated) short- and long-time EDS, WDS and EBSD analysis and mapping. The system's excellent lateral resolution enables easy detection of low-Z elements at low beam energies, adding value and flexibility to the Inspect F50.

INSPECT F50

The FEI (Philips) XL30 TMP is a traditional scanning electron microscope (SEM) from the XL Series that is versatile and suitable for a wide range of applications. It delivers exceptional performance for both imaging and micro-analysis of conductive and/or coated samples, making it ideal for specialized research in metallography as well as routine tasks such as monitoring manufacturing processes. The XL30 TMP has an electron optical column with a conical final lens and a fixed final lens aperture, which is designed for high-resolution imaging, X-ray microanalysis, and low magnification performance. The system also features extensive automation and user-friendly software control, making it an excellent tool for both novice and experienced users.

XL30 TMP

The Quanta 650 FEG is a versatile scanning electron microscope that uses field emission technology to provide high-resolution imaging in a variety of vacuum environments. This includes high vacuum, low vacuum, and extended vacuum (also known as environmental SEM or ESEM). The microscope is capable of characterizing a wide range of samples, including conductive, non-conductive, and wet samples. It can also be used to perform in-situ dynamic experiments. The Quanta 650 FEG can resolve features on a scale of less than 5 nanometers. It is equipped with a Field Emission Gun (FEG) that allows for both bright-field and dark-field imaging. The microscope is used for high-resolution imaging and semi-quantitative X-ray microanalysis of specimens at nanometer resolution, with a magnification range from 5 to 1,000,000x. It has two modes: Variable pressure (VP) mode, with a pressure range of 100-200Pa.

QUANTA 650 FEG

VERIOS 5 UC XHR

The XL30 SFEG is a high-resolution SEM produced by ThermoFisher (previously known as FEI). It is a versatile instrument for advanced research in fields such as materials science, semiconductors, electronic devices, failure analysis, and life science. The microscope employs a Schottky-type field emission source and supports a broad range of accelerating voltages from 200 V to 30 kV. It can achieve resolutions of 1.5 nm at > 10 kV and 2.5 nm at 1 kV. The microscope is equipped with a full set of detectors for imaging in secondary and back-scattered electrons, including a Through-the-Lens detector with variable bias for high-resolution observation. The system is designed for operation at low kV, allowing uncoated and insulating materials to be examined with minimal charging. The XL30 SFEG also offers high spatial resolution structural research and high-resolution analytical work with techniques such as EDS, CL, EBSD, and EBIC.

XL30 SFEG

XL50S

TITAN 80-300 XTWIN

The FEI Nova NanoLab 400 is a dual beam device that comes with both a Focused Ion Beam (FIB) and a Field Emission Scanning Electron Microscope (SEM). It is designed to provide high-resolution imaging and analysis, and features a motorized stage for improved results. Another model from FEI, the Helios NanoLab 400, has a five-axis stage that can move 100 mm in both the X and Y directions. Its all-axis piezo drive and chamber mounting offer top-of-the-line stage repeatability. Samples as large as 100 mm can be loaded through the load lock for maximum efficiency. 

NOVA 400 NANOLAB

The FEI XL30 is a true ESEM with the ability to image specimens at pressures up to 20 mbar. It is also equipped with a cold stage capable of reaching temperatures down to -100 C. When running in high vacuum mode, it’s a very capable general purpose SEM utilizing a tungsten electron source. The extremely friendly user interface makes it ideal for novice users who do not require the higher resolution capabilities of an FESEM. Additional capabilities include EDS analysis and a nano-CT X-ray imaging system.



XL30

The FEI Strata DB 235 is a dual-beam system that combines the capabilities of a focused ion beam (FIB) and a scanning electron microscope (SEM). It features both a Hexalens electron column and a Magnum ion column, making it well-suited for failure analysis and high-end sample preparation. The SEM component uses a Schottkey emitter and operates at 200-300 kV, while the FIB component uses Gallium liquid metal and operates at 5 to 30 kV with a current range of 1pA to 20 nA. The system offers high resolution, with 3 nm for SEM and 7 nm for FIB. It is controlled by the Window NT system and can perform automated TEM sample preparation. An attached EDAX electron dispersive X-ray analysis system allows for chemical analysis. Additionally, the FIB/SEM has the unique ability to add or remove material with high spatial resolution between precisely defined locations.

STRATA DB 235

XL 30 FEG

The Helios NanoLab 600 is a Dual Beam FIB/SEM (Focused Ion Beam/Scanning Electron Microscope) that is designed for high-end imaging during failure analysis. It features an extreme high-resolution column, a fine-probe ion source, and a 150 x 150 mm, five-axis, XY piezo stage. This makes it a smart investment for failure-analysis labs that require versatile sample handling, from packaged parts to eight-inch wafers. The Helios NanoLab 600 is particularly useful for cross-sectioning samples and delivers three-dimensional imaging, allowing you to quickly and efficiently locate and view device features from different angles. Additionally, patented beam chemistries can be used to highlight interface layers for imaging in the system, providing you with the most accurate data possible without additional preparation steps outside the system.

HELIOS NANOLAB 600

Nova 600 Nanolab DualBeam-SEM/FIB for Nanoscale Prototyping, Machining, Characterization, and Analysis of Structures below 100 nm.

NOVA 600 NANOLAB

DUALBEAM 835

The FEI FIB 200 is a type of Focused Ion Beam (FIB) system that has many uses, such as editing circuits, analyzing defects and failures, preparing TEM lamella, fabricating nanostructures, prototyping at the nanoscale, and working with MEMS. There are a few different models of the FEI FIB 200, including the FEI FIB 200-M and the FEI FIB 200-P. The FEI FIB 200-M model features a Magnum ion column that provides twice the milling power of earlier pre-lens FIB columns. It also has a voltage range of 5-30kV for its Magnum column, a beam current of 21nA for milling power, and CDEM for ion and electron imaging with a resolution of 7nm. The FEI FIB 200-P model, on the other hand, uses a pre-lens ion column.

FIB 200

The FEI Quanta 200 3D is a type of environmental scanning electron microscope (ESEM) that uses a tungsten cathode to generate electrons. It is known as an “environmental” microscope because it can operate under varying pressure conditions and even at 100% humidity. This microscope is capable of achieving a resolution of 3.5 nm when operating at 30 kV in both high vacuum and ESEM modes, and a resolution of less than 15 nm when operating at 3 kV in low vacuum mode. The FEI Quanta 200 3D has an adjustable accelerating voltage range from 200 V to 30 kV, and can achieve magnifications ranging from 10X to 300,000X. Additionally, the microscope is equipped with five motorized axes (x = 50 mm, y = 50 mm, z = 25 mm, tilt (-10 to 60 degrees), and rotation (n x 360 degrees)) for precise sample positioning and manipulation.

QUANTA 200 3D

Strata 400S

The Nova NanoSEM 230 is a scanning electron microscope that offers enhanced capabilities compared to its predecessor. It excels in low and very low kV characterization and has improved analytical capabilities. With the Nova NanoSEM 230, it is possible to access sub-100V imaging with high surface sensitivity, achieve superb low kV BSE, and perform faster analysis. In summary, the Nova NanoSEM 230 is a powerful tool for low kV characterization and analysis.

NOVA NANOSEM 230

The Nova NanoSEM 600 is a type of high-resolution scanning electron microscope (SEM) that comes equipped with SED, BSED, and STEM detectors. It is a Dual Beam SEM/FIB system that combines the capabilities of ultra-high resolution field emission Scanning Electron Microscopy (SEM) with the precision of Focused Ion Beam (FIB) etching and deposition, making it ideal for nanoscale prototyping, machining, characterization, and analysis. When operating in STEM mode, this microscope can achieve a resolution as low as 1 nanometer. Additionally, the Nova NanoSEM 600 is capable of operating under low vacuum conditions and offers a range of analytical options including EBSD and EDS.

NOVA NANOSEM 600

The FEI Quanta 3D FEG is a dual beam system that combines a field emission scanning electron column and an ion column with a Gallium ion source. It is equipped with multiple analytical and manipulative tools, allowing for the application of different techniques and methods within the same chamber. The system features three imaging modes: high vacuum, low vacuum, and ESEM, and is equipped with high-resolution imaging and surface analysis methodologies such as BSE, SE, ISE, and EDS. The ion and electron beam can be used in combination with a gas injection system to deposit thin layers of Pt to protect an exploration site. The instrument also has a Peltier cooling stage and an automated nanomanipulator from Omniprobe.

QUANTA 3D FEG

QUANTA 250 FEG

The FEI Quanta 400 is a high-performance field emission scanning electron microscope (SEM) that comes with SE, backscatter, and EDS detectors. It has the ability to operate in high vac, low vac, and Wet modes and has a cooling stage. The Quanta 400 is an easy-to-use ESEM that does not require external cooling or compressed air. Its simple installation process and built-in peripherals make it user-friendly. Additionally, this instrument is fitted with an EDAX EDS system.

QUANTA 400

QUANTA 600 FEG

ALTURA 835

QUANTA 450 FEG

The FEI XL830 is a DualBeam FIB/SEM system that offers high-resolution SEM imaging and quick, accurate ion milling. The SEM column of the DualBeam XL830 workstation delivers 3-nm resolution within the range of 1-30 kV, while the electron column features balanced-field, in-lens detection that provides detailed topographical information, improved visibility down holes, and enhanced imaging of grain boundaries.

XL830

FEl's Altura- 855 offers the ultimate tools for defect characterization, failure analysis, and TEM sample preparation on
patterned and unpatterned wafers, as well as piece parts.

ALTURA 855

ALTURA 810

ALTURA 830

The Quanta 200 is a type of scanning electron microscope (SEM) that was once manufactured by FEI. This versatile instrument can be used in both high-vacuum and low-vacuum modes, allowing for the imaging of a wide range of samples. The electron beam in the Quanta 200 is produced by a traditional tungsten filament electron source, which can resolve features as small as 3 nm under ideal conditions. The instrument is equipped with standard Secondary Electron (SE) and Back Scatter Electron (BSE) detectors, as well as an Energy Dispersive X-ray Analysis (EDS) detector and an internal TV camera. Some of the Quanta 200’s features include SE, BSE, and EDS detectors; an accelerating voltage range of 200 V to 30 kV; a resolution of 3.0 nm at 30 kV; and a resolution of 10 nm at 3 kV.

QUANTA 200

QUANTA 400HV

PHENOM FP 3950/00

Strata 210

The FEI Nova NanoLab 200 is a powerful tool for researchers and developers working with complex structures below 100 nanometers. It combines ultra-high resolution field emission scanning electron microscopy (SEM) and precise focused ion beam (FIB) etch and deposition to provide advanced capabilities and flexibility. This tool complements existing nanotechnology laboratory tools and extends the range of applications for nanoscale prototyping, machining, 2D and 3D-characterization, and analysis.

NOVA 200 NANOLAB

FEI’s Strata 400 STEM is a high-resolution analytical tool designed to support the increasing need for high-resolution analytical capabilities as device geometries shrink below 100 nm and new material systems are introduced. It includes integrated sample lift-out and handling, with SEM-STEM imaging to enable high-contrast, high-resolution analysis. The innovative Flipstage™ moves the sample from milling to STEM-imaging position in seconds, without breaking vacuum, while the new Sidewinder™ ion column provides improved sample throughput and ultimate sample quality. 

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

6" Fab For Sale from Moov - Click Here to Learn More

THERMOFISHER SCIENTIFIC / FEI / PHILLIPS

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INSPECT F50

MAGELLAN 400L

NOVA NanoSEM 200

VERIOS 460

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