概要（Overview）

The FEI XL30S is a scanning electron microscope (SEM) that is equipped with advanced features such as a Schottky field emission gun and an Everhart-Thornley detector for secondary electrons. It delivers ultrahigh resolution imaging and is capable of integrating with EDAX detectors, making it ideal for various fields of study. The XL30S offers several modes of operation, including beam deceleration, scanning transmission electron microscopy (STEM), and energy dispersive X-ray spectroscopy (EDS). It also features a WetSTEM system for imaging truly wet samples.