説明

UVISEL Spectroscopic Ellipsometer Spot size & Microspot Standard spot size : < 3 mm (at 90o) Manual microspot option: 3 positions: 50 μm - 100 μm - 1 mm (at 90o) Automatic microspot option: 4 positions: 80 μm - 120 μm - 250 μm - 1.2 mm (at 90o) Sample Stage Manual stage: 150 mm, manually adjustable height (20 mm) and tilt Motorized stage option: 200 mm or 300 mm (on request) Rotation stage option: 150 mm, high precision automated sample rotation (360°- θ only), resolution: 0.005° Goniometer Manual goniometer: manually adjustable angle from 55° to 90° by step of 5° Motorized goniometer option: automatically adjustable angle from 40° to 90° by steps of 0.01° Monochromator High resolution scanning monochromator For FUV-VIS range: High sensitivity photomultiplier detector & low stray light For NIR extension: InGaAs detector

構成

I do not have any materials for this model. However the UVISEL Plus is very similar. See attached for similar model brochure Key differences – you have a CTL UNIT that connect to PC; UVISEL Plus split the CTL Unit into two units – Monochromators you have either a FUV and IHR or only IHR. Uvisel Plus has different monos – Polarizer is the same – Modulator is the same but the housing on the UVISEL plus contains filters where your Mono has the filters attached. Other options like variable angle goniometer and stage will appear the same. Spectral range and capability the same. The USER interface is nearly identical (Delta PSI 2)

OEMモデルの説明

The UVISEL Spectroscopic Phase Modulated Ellipsometer is a unique instrument that delivers the highest accuracy and precision for demanding research and industrial QC applications. It covers a wide spectral range from 190 to 2100 nm, with a complete application database included in the software.