説明

Electron Analyzer: Double-focusing full 180° spherical sector analyzer Magnetic and multi-element electrostatic input lenses Multi-channel spectroscopic detector X-ray: AlKα X-ray Source Microfocused electron gun Multi-position aluminum anode Two toroidal quartz crystals Electron Flood Gun: Charge compensation Digital control Ion Source: Manual control Depth profiling Sample cleaning Secondary electron imaging ISS Automated 4-axis Sample Manipulator Avantage Software for Data Acquisition and Analysis Instrument control: Data acquisition and processing, peak fitting Multi-sample, multi-point data acquisition Unattended data acquisition Sample Options: 5-axes sample manipulator In main chamber sample heating and cooling UV Photoelectron Spectroscopy (UPS): High intensity UV lamp Helium gas admission system 95nm-resolution AES/SEM/SAM Electron Gun: Schottky type field emission source SEM detector The combination of high efficiency lenses and detectors on ESCALAB 250 ensure the highest sensitivity in X-ray photoelectron spectroscopy (XPS) applications. High speed acquisition Excellent sensitivity with spatial resolution 106 counts/s in normal operating conditions (0.6 eV at FWHM, Ag sample) Maximum chemical detectability Energy Resolution ESCALAB 250 provides excellent energy resolution by combining an advanced analyzer design with a twin crystal microfocusing X-ray monochromator. Identification and quantification of chemical states Resolve interfaces and overlapping peaks Auger Electron Spectroscopy: 95 nm spot size at 5 nA SEM and SAM imaging Small Area XPS: defined by x-rays gun small area from 120μm to 650μm Insulating samples are analyzed using charge compensation with e- and Ar+ flood guns. Sample Preparation Samples should be less than 14mm, preferred size is about 3-5mm. The sample thickness should be less than 3mm