説明
Model: PEA983_M10 Software Version 586 CIM SECS,GEM Process Batch process Missing/Faulty Parts / Accessories List Description: NONE General: Main tool, Booster Pump, Diw heater Canister Console, UPS, Transformer, Parts構成
Hardware Configuration (Fab) System Type Description Quantity Status Handler System : NA Options System : Hardware Configuration (Subfab / Auxilliary Units) Description: NoneOEMモデルの説明
The MERCURY® MP Surface Conditioning System is a wet-chemical batch processing tool for wafers up to 200 mm in diameter. It offers reliable and repeatable processing for a variety of applications, with the flexibility and control to ensure superior performance and high yields. The system can be fully automated with the addition of an optional material handling system. The MERCURY MP system uses FSI centrifugal spray technology, which provides several advantages, including reduced chemical, DI water, and disposal costs, as well as a smaller footprint than typical wet processing systems. Etching applications that can be performed in the MERCURY system include patterned aluminum etch/strip, wafer reclaim, oxide etch/strip, and polysilicon deglaze.ドキュメント
カテゴリ
Spray Solvent / Acid
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
123819
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
TEL / FSI
MERCURY MP
カテゴリ
Spray Solvent / Acid
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
123819
ウェーハサイズ：
8"/200mm
ヴィンテージ：
2015
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available