説明
CHEMICAL RESIST STRIP(CRSAT-11)構成
構成なしOEMモデルの説明
The ZETA Surface Conditioning System is a fully automated centrifugal spray processor designed for advanced, batch cleaning, etching and stripping applications on 200-mm and 300-mm wafers. The system is completely closed, providing greater process control and repeatability in an extremely clean environment. Compared to traditional wet cleaning technologies, the ZETA system uses less fab space and chemicals and operates at a much lower cost. It performs a variety of etching applications, including patterned aluminum etch/strip, wafer reclaim, oxide etch/strip, and polysilicon deglaze.ドキュメント
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TEL / FSI
ZETA
カテゴリ
Spray Solvent / Acid
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
133313
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
CHEMICAL RESIST STRIP(CRSAT-11)構成
構成なしOEMモデルの説明
The ZETA Surface Conditioning System is a fully automated centrifugal spray processor designed for advanced, batch cleaning, etching and stripping applications on 200-mm and 300-mm wafers. The system is completely closed, providing greater process control and repeatability in an extremely clean environment. Compared to traditional wet cleaning technologies, the ZETA system uses less fab space and chemicals and operates at a much lower cost. It performs a variety of etching applications, including patterned aluminum etch/strip, wafer reclaim, oxide etch/strip, and polysilicon deglaze.ドキュメント
ドキュメントなし