
説明
説明なし構成
1 Etch chamber, 1 SRD Chamber 2 Heated Tanks (HF) 6 Inch clamp shell RotorOEMモデルの説明
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.ドキュメント
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同様のリスト
すべて表示SEMITOOL
SAT
カテゴリ
Spray Solvent / Acid
最終検証: 60日以上前
主なアイテムの詳細
状態:
Refurbished
稼働ステータス:
Installed / Running
製品ID:
106133
ウェーハサイズ:
不明
ヴィンテージ:
2006
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
1 Etch chamber, 1 SRD Chamber 2 Heated Tanks (HF) 6 Inch clamp shell RotorOEMモデルの説明
The Spray Acid Tool (SAT) is a versatile tool that offers a range of cleaning, etching, and stripping capabilities. It features a multichamber design that allows for safe and economical operation in a completely closed environment. The SAT is 300mm ready, meaning it can handle wafers of that size. Some of the specific applications of the SAT include post-CMP clean, photo-resist strip, polymer removal, pre-diffusion clean, monitor wafer clean, and metal etch. These processes are essential for the preparation and maintenance of semiconductor wafers during the manufacturing process.ドキュメント
ドキュメントなし