説明
説明なし構成
CLASSONE TECHNOLOGY TRIDENT SPRAY SOLVENT TOOL CONFIGURED FOR: -TANK 1 HEATED EC SOLVENT FRESH CHEMICAL -TANK 2 HEATED EC SOLVENT RECLAIM CHEMICAL -TANK 3 UNHEATED IPA FRESH -TANK 4 UNHEATED IPA RECLAIM COMPRISING OF: - Model: SST-421-25-200 TDC T-SST - Max Wafer Size: 8”/200mm wafers in low-profile cassette - Single 25-wafer Process Chamber accommodates 1 x standard cassette - Single Stainless Steel Rotor - Automated Door with Mechanical Door Lock - 4 Tanks: 20-Liter Stainless Steel Tanks: - 2 Tanks Heated - 2 Tanks Un-Heated Tanks 1-4 can be used as Fresh or Reclaim pairs, based on recipe. - Carrier Present Sensor - ELO Touch Screens, Front & Rear - Analog Level Sensors - High flow manifold design - Closed-Loop Flow Control using Levitronix Pumps - Leviflow® Ultrasonic Flow Meters - Vibration-Free Modular Mounting System - In-line Chemical Heaters, 1200W, with Closed-Loop Control - Non-Contact N2 Heater for rapid drying - Adjustable N2 Nozzles - Direct Drive Brushless Motor - Emergency Power Off (EPO), Front and Rear - Dynamic Rotor-Stop Positioner - St. Gobain Drain Block - St. Gobain Teflon Valves - PFA Fittings - Zero Dead Leg with Constant DI Water Recirculation - 2 Chemical and 1 IW Drain (Standard) - All Stainless Steel Cabinetry, Easy-Access Panels - Integrated Fire Detection/Suppression System includes installation and certification - CE Marked - System Manuals (soft copy) provided on the tool, accessible from the computer monitorOEMモデルの説明
The Trident™ Spray Solvent Tools (SST) from ClassOne Technology are the next generation of batch-processing systems for metal lift-off, photoresist strip, polymer removal, and other solvent-based processes. Trident Spray Solvent Tool models are available for up to 200mm substrates — with two, four, or six heated chemical tanks; and a wide range of rotors. ClassOne can accommodate a range of wafer sizes, engineering rotors for most shapes and sizes. These systems include ClassOne’s proven Windows®10-based Solaris™ controller and provide remote login, data logging, GEM/SECSII communications, and reliability reporting.ドキュメント
ドキュメントなし
CLASSONE TECHNOLOGIES
TRIDENT SST
検証済み
カテゴリ
SRD
最終検証： 60日以上前
主なアイテムの詳細
状態：
New
稼働ステータス:
不明
製品ID：
78420
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CLASSONE TECHNOLOGIES
TRIDENT SST
カテゴリ
SRD
最終検証： 60日以上前
主なアイテムの詳細
状態：
New
稼働ステータス:
不明
製品ID：
78420
ウェーハサイズ：
不明
ヴィンテージ：
不明
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
CLASSONE TECHNOLOGY TRIDENT SPRAY SOLVENT TOOL CONFIGURED FOR: -TANK 1 HEATED EC SOLVENT FRESH CHEMICAL -TANK 2 HEATED EC SOLVENT RECLAIM CHEMICAL -TANK 3 UNHEATED IPA FRESH -TANK 4 UNHEATED IPA RECLAIM COMPRISING OF: - Model: SST-421-25-200 TDC T-SST - Max Wafer Size: 8”/200mm wafers in low-profile cassette - Single 25-wafer Process Chamber accommodates 1 x standard cassette - Single Stainless Steel Rotor - Automated Door with Mechanical Door Lock - 4 Tanks: 20-Liter Stainless Steel Tanks: - 2 Tanks Heated - 2 Tanks Un-Heated Tanks 1-4 can be used as Fresh or Reclaim pairs, based on recipe. - Carrier Present Sensor - ELO Touch Screens, Front & Rear - Analog Level Sensors - High flow manifold design - Closed-Loop Flow Control using Levitronix Pumps - Leviflow® Ultrasonic Flow Meters - Vibration-Free Modular Mounting System - In-line Chemical Heaters, 1200W, with Closed-Loop Control - Non-Contact N2 Heater for rapid drying - Adjustable N2 Nozzles - Direct Drive Brushless Motor - Emergency Power Off (EPO), Front and Rear - Dynamic Rotor-Stop Positioner - St. Gobain Drain Block - St. Gobain Teflon Valves - PFA Fittings - Zero Dead Leg with Constant DI Water Recirculation - 2 Chemical and 1 IW Drain (Standard) - All Stainless Steel Cabinetry, Easy-Access Panels - Integrated Fire Detection/Suppression System includes installation and certification - CE Marked - System Manuals (soft copy) provided on the tool, accessible from the computer monitorOEMモデルの説明
The Trident™ Spray Solvent Tools (SST) from ClassOne Technology are the next generation of batch-processing systems for metal lift-off, photoresist strip, polymer removal, and other solvent-based processes. Trident Spray Solvent Tool models are available for up to 200mm substrates — with two, four, or six heated chemical tanks; and a wide range of rotors. ClassOne can accommodate a range of wafer sizes, engineering rotors for most shapes and sizes. These systems include ClassOne’s proven Windows®10-based Solaris™ controller and provide remote login, data logging, GEM/SECSII communications, and reliability reporting.ドキュメント
ドキュメントなし