説明
ILINE STEPPER構成
構成なしOEMモデルの説明
The PAS 5500/250C is an i-line stepper specified at a resolution of 0.30 µm. Focal plane deviation, astigmatism, and distortion have all been improved without compromising overlay performance, which is now specified at < 45 nm. Leadership productivity is maintained at more than 93 wph (ATP settings). The PAS 5500/250C uses an AERIAL™ illuminator, which provides flexible and automated NA/Sigma combinations in both conventional and off-axis illumination modes while maintaining high intensities to enable economical mass production of leading-edge devices.ドキュメント
ドキュメントなし
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
133128
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
ASML
PAS 5500/250C
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
133128
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1999
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
ILINE STEPPER構成
構成なしOEMモデルの説明
The PAS 5500/250C is an i-line stepper specified at a resolution of 0.30 µm. Focal plane deviation, astigmatism, and distortion have all been improved without compromising overlay performance, which is now specified at < 45 nm. Leadership productivity is maintained at more than 93 wph (ATP settings). The PAS 5500/250C uses an AERIAL™ illuminator, which provides flexible and automated NA/Sigma combinations in both conventional and off-axis illumination modes while maintaining high intensities to enable economical mass production of leading-edge devices.ドキュメント
ドキュメントなし