
説明
i-Line Stepper構成
構成なしOEMモデルの説明
The FPA-3000i5+ is a high productivity mix-and-match partner with Canon excimer series scanners and steppers. Wide-field lens with extra NA variability supports a variety of fine patterning processes. This highly proven and successful veteran of the Canon stepper line-up has been a best-selling product since its release in 1996. Features: -Supports varieties of fine pattern demands. High resolution, wide-field lens, extra NA variability, plus reticle options. -High alignment accuracy for CMP processes. Two off-axis methods in addition to Canon's original technologyドキュメント
ドキュメントなし
検証済み
カテゴリ
Steppers & Scanners
最終検証: 30日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
121121
ウェーハサイズ:
8"/200mm
ヴィンテージ:
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示CANON
FPA-3000i5+
カテゴリ
Steppers & Scanners
最終検証: 30日以上前
主なアイテムの詳細
状態:
Used
稼働ステータス:
不明
製品ID:
121121
ウェーハサイズ:
8"/200mm
ヴィンテージ:
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
i-Line Stepper構成
構成なしOEMモデルの説明
The FPA-3000i5+ is a high productivity mix-and-match partner with Canon excimer series scanners and steppers. Wide-field lens with extra NA variability supports a variety of fine patterning processes. This highly proven and successful veteran of the Canon stepper line-up has been a best-selling product since its release in 1996. Features: -Supports varieties of fine pattern demands. High resolution, wide-field lens, extra NA variability, plus reticle options. -High alignment accuracy for CMP processes. Two off-axis methods in addition to Canon's original technologyドキュメント
ドキュメントなし