説明
System Issues: 1.Reticle stage leakage 2.PLC temp abnormal Cymer XLA 130 laser 2.Cymer chamber(MO/PA) damaged構成
ArF scanner (4X) Includes a Canon FPA-60000AS4 main body, Cymer laser, and chiller.OEMモデルの説明
The FPA-6000AS4 is an ArF scanner that is the industry’s fastest and has the highest NA (0.85). It can project features as small as 85nm and is built on Canon’s new 140-wph, F2-capable FPA-6000 single-stage platform. It provides a cost-optimized solution for high volume 300mm or 200mm exposure processes for leading-edge device manufacturers choosing a mix-and-match strategy. The scanner has a 0.85-NA, 4:1 reduction lens system and is capable of 85-nanometer resolution with an overlay precision of 18nm.ドキュメント
ドキュメントなし
CANON
FPA-6000AS4
検証済み
カテゴリ
Steppers & Scanners
最終検証： 10日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
115820
ウェーハサイズ：
不明
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
CANON
FPA-6000AS4
カテゴリ
Steppers & Scanners
最終検証： 10日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
115820
ウェーハサイズ：
不明
ヴィンテージ：
2004
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
System Issues: 1.Reticle stage leakage 2.PLC temp abnormal Cymer XLA 130 laser 2.Cymer chamber(MO/PA) damaged構成
ArF scanner (4X) Includes a Canon FPA-60000AS4 main body, Cymer laser, and chiller.OEMモデルの説明
The FPA-6000AS4 is an ArF scanner that is the industry’s fastest and has the highest NA (0.85). It can project features as small as 85nm and is built on Canon’s new 140-wph, F2-capable FPA-6000 single-stage platform. It provides a cost-optimized solution for high volume 300mm or 200mm exposure processes for leading-edge device manufacturers choosing a mix-and-match strategy. The scanner has a 0.85-NA, 4:1 reduction lens system and is capable of 85-nanometer resolution with an overlay precision of 18nm.ドキュメント
ドキュメントなし