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説明
i-line stepper HDD included構成
Electric source (without/with) NEMA BOX / For (CVCF/UPS) / NEMA Switch(none/1/2) Chamber Type Maker ASAHI / SENDAI Production date 1994. 01 Model S810 Chamber Size 1750 SET Temperature Chamber : ℃ LATC(LLTC): ℃ IATC: ℃ Reticle Microscope Fixed ( )/ Variable ( mm to mm ) / setting size ( ) Main Software version Computer Type PDP11(73/93) / NEST ( ) ROM Version ST- XY-EP- PA-WF-CE- WA-LC-RA- RL- HP LASER 5517A / 5517B / 5517C LSA LASER 5mW / 10mW ITV Camera Nikon Original Type / Nikon New Type / Custom eng. / Other Wafer Size 2inch / 2.5inch / 3inch / 4inch / 6inch / 8inch Wafer Condition Sapphire / Silicon / Other OF Detection Type Nikon Original Type / Omron type / Keyence type Wafer Loader Type Type1 / Type2 (A1 / A3) Wafer Carrier Table Left / Right / Extra In-line no / yes (right/left) Reticle Size 5inch(32mm / 26mm / 18mm) /6inch FIA no / yes Reticle Library Slot Main : ( 23 ) slot / Ext. LIB ( 16 ) slot PPD /PD/ Extension LIB PPD ( no/yes ) PD( no/yes ) Extension LIB( no/yes ) Rack Type Normal (Right / Left) / Special NOTE Wafer Stage 8-6"OEMモデルの説明
The Model NSR-2005i8A is an i-line stepper designed for mass producing large die size, half micron devices. With a 6 in. reticle, it can generate three 16Mb DRAM chips in a single exposure. The exposure area is 15.9 mm x 25.2 mm with 6 in. reticles and 20 mm x 20 mm with 5 in. reticles. It is fully compatible with Nikon Precision Inc.'s NSR-1505/1755 Series steppers for existing customers.ドキュメント
検証済み
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
113091
ウェーハサイズ：
2"/50mm, 3"/75mm, 4"/100mm, 6"/150mm, 8"/200mm
ヴィンテージ：
1994
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
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すべて表示
NIKON
NSR-2005i8A
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
113091
ウェーハサイズ：
2"/50mm, 3"/75mm, 4"/100mm, 6"/150mm, 8"/200mm
ヴィンテージ：
1994
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available