説明
説明なし構成
-PC type: Vax 4000/90 ,96 or other WINDOWS HDD DKA200, DKA300 -SET Temperature Chamber LLTC IATC -Main Software: MCSV 2.42 -Unit Software: RL ALG PA STG LC WL -Chamber Type: SENDAI S19 -Reticle Size: 6 inch -Reticle microscope: Fixed or Moveable Fixed RA field 22*22 -PPD: No -Reticle Barcode Reader: Yes -Library: Unit 13 Slot -Wafer Chuck: Type Ring Pre2 set have or not: Have -Wafer Loader Loader Type: Type 3 Wafer size: 6 Inch Notch or Flat: Flat -In-Line: No -Wafer Carrier Table: Right/Extra -Alignment sensor: LSA: Yes FIA: Yes LIA: No -Interferometer Laser: Type 5517C -Rack Type: Left -Lamp Power: 2000W -SHRINC: 3 -Signal Tower: Not -Projection Lens Serial Number - LLTC leakage: NoOEMモデルの説明
"This i-line stepper from Nikon is one of our most popular lithography systems. Resolution ≦ 350 nm, exposure light source i-line (365 nm wavelength), reduction ratio 1:5, exposure field 22mm square to 17.9 (H) × 25.2 (V) mm (6-inch reticle), 20.0 × 20.4 mm (5-inch reticle), alignment accuracy (EGA, |M| + 3σ) ≦ 55 nm. The NIKON NSR 2205 i12D is a Steppers and Scanners system. The NSR 2205 i12D can be used with 8” wafer sizes.ドキュメント
ドキュメントなし
NIKON
NSR-2205i12D
検証済み
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
94486
ウェーハサイズ：
6"/150mm
ヴィンテージ：
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
NIKON
NSR-2205i12D
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
94486
ウェーハサイズ：
6"/150mm
ヴィンテージ：
1999
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
-PC type: Vax 4000/90 ,96 or other WINDOWS HDD DKA200, DKA300 -SET Temperature Chamber LLTC IATC -Main Software: MCSV 2.42 -Unit Software: RL ALG PA STG LC WL -Chamber Type: SENDAI S19 -Reticle Size: 6 inch -Reticle microscope: Fixed or Moveable Fixed RA field 22*22 -PPD: No -Reticle Barcode Reader: Yes -Library: Unit 13 Slot -Wafer Chuck: Type Ring Pre2 set have or not: Have -Wafer Loader Loader Type: Type 3 Wafer size: 6 Inch Notch or Flat: Flat -In-Line: No -Wafer Carrier Table: Right/Extra -Alignment sensor: LSA: Yes FIA: Yes LIA: No -Interferometer Laser: Type 5517C -Rack Type: Left -Lamp Power: 2000W -SHRINC: 3 -Signal Tower: Not -Projection Lens Serial Number - LLTC leakage: NoOEMモデルの説明
"This i-line stepper from Nikon is one of our most popular lithography systems. Resolution ≦ 350 nm, exposure light source i-line (365 nm wavelength), reduction ratio 1:5, exposure field 22mm square to 17.9 (H) × 25.2 (V) mm (6-inch reticle), 20.0 × 20.4 mm (5-inch reticle), alignment accuracy (EGA, |M| + 3σ) ≦ 55 nm. The NIKON NSR 2205 i12D is a Steppers and Scanners system. The NSR 2205 i12D can be used with 8” wafer sizes.ドキュメント
ドキュメントなし