説明
Details Attached構成
Magnification 1/5 Reduction Light-Source i-Line(365nm) Resolution 0.5um Variable Lens NA 0.30 ~ 0.45 (variable) Exposure Filed Size 22 mm × 22 mm Control Bellows Lens Adjust Micrometer PC System Hardware Type NIKON NEST-V UPS System No Reticle Microscope Variable / Fixed Variable Alignment Sensor LSA Yes FIA Yes LIA No TTLFC2 Yes Measure Software Yes Illumination System Interferometer System LAMP 1.75Kw Hg Lamp Wafer Stage 5517C Reticle Stage 5517C Focus System Single / Multi Focus Multi Focus Leveling System Normal / Table Table Leveling Wafer Loader Wafer Size 8 inch Wafer OF / Notch Type Notch Type1 / Type2 / Type3 Type2 Wafer Holder Type Ring Type Wafer Cassette 2 Cassette Wafer IN-Line Left In-Line Wafer alignment LSA, FIA Wafer Edge Exposure No Reticle Loader Reticle Size 5inch or 6 inch Normal / SMIF Type Nomal Type Library / SLOT 1 Lib. / 14Slot Barder Reader Yes Particle Checker No Control Rack Type Left Type Cable Length Normal Signal Tower 3 Color / 4 Color Type No Chamber Air Conditioner Sendai Model S16 Temp. Controller Sendai Model S16 Refrigerant HFC-R407C / FC-77 Single / CVCF NEMA Single Electrical Power Spec 200/208~V, 50/60Hz, 3-Phase (BATC/CATC/LLTC) 19.7°C / 19.9°C / 19.7°COEMモデルの説明
NIKON NSR TFH i12 is a Steppers and Scanners system. The NSR TFH i12 can produce wafer size of 6”.ドキュメント
検証済み
カテゴリ
Steppers & Scanners
最終検証： 12日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
147186
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
NIKON
NSR-TFHi12
カテゴリ
Steppers & Scanners
最終検証： 12日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
147186
ウェーハサイズ：
8"/200mm
ヴィンテージ：
1998
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available