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説明
説明なし構成
-Handedness: Inline left (std) or right -Altitude: Varies by site -Lens Type: 4aN8EK (D type lens) -Numerical Aperture: 0.85~1.35 -sPURE (subject to availability) -Quick Reticle Change (QRC) -Aerial Image Sensor (AIS) -AIS-RA (AIS-Reticle Alignment) -iPot(integrated projection optics tester) -5-eye Field Image Alignment system (FIA) -Excimer laser with Advanced Spectral Control (ASC) -Hard Aperture: 11slots (Cross Hair, Annular, AIS-coma etc) -POLANO -Beam Matching Unit -25-wafer FOUP port -Pre-alignment matching to other NSR -6" reticle size -Position of Reticle SMIF loadport: Right hand operation -2 Reticle SMIF loadports -12-slot reticle buffer -SEMI 2D Reticle Barcode Reader -Reticle Prealignment -Reticle Autofocus -PPD(Pellicle Particle Detector) -PPD Pellicle Height Error Warning -CDA Purge Kit Systems Computers: -UIP (Operational Computer) Operating System: Windows Embedded -SQP (Sequence Processing Computer) Operating System: VMS -SVR (File Server) Operation System: Linux -eXDP (Data Collection Server) Operation System: Windows SeverOEMモデルの説明
NSR-S621D (resolution ≦ 38 nm).ドキュメント
ドキュメントなし
NIKON
NSR-S621D
カテゴリ
Steppers & Scanners
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
103696
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
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説明
説明なし構成
-Handedness: Inline left (std) or right -Altitude: Varies by site -Lens Type: 4aN8EK (D type lens) -Numerical Aperture: 0.85~1.35 -sPURE (subject to availability) -Quick Reticle Change (QRC) -Aerial Image Sensor (AIS) -AIS-RA (AIS-Reticle Alignment) -iPot(integrated projection optics tester) -5-eye Field Image Alignment system (FIA) -Excimer laser with Advanced Spectral Control (ASC) -Hard Aperture: 11slots (Cross Hair, Annular, AIS-coma etc) -POLANO -Beam Matching Unit -25-wafer FOUP port -Pre-alignment matching to other NSR -6" reticle size -Position of Reticle SMIF loadport: Right hand operation -2 Reticle SMIF loadports -12-slot reticle buffer -SEMI 2D Reticle Barcode Reader -Reticle Prealignment -Reticle Autofocus -PPD(Pellicle Particle Detector) -PPD Pellicle Height Error Warning -CDA Purge Kit Systems Computers: -UIP (Operational Computer) Operating System: Windows Embedded -SQP (Sequence Processing Computer) Operating System: VMS -SVR (File Server) Operation System: Linux -eXDP (Data Collection Server) Operation System: Windows SeverOEMモデルの説明
NSR-S621D (resolution ≦ 38 nm).ドキュメント
ドキュメントなし