説明
i-Line Wide-Field Stepper構成
構成なしOEMモデルの説明
i-Line The NSR-SF155 is the seventh generation SF system. The SF155 design incorporates the groundbreaking Skyhook platform of the SF150 system, but includes key performance enhancements. Like the SF150, the SF155 uses optimized load and unload positioning to reduce wafer exchange time, along with increased alignment processing speed to shorten wafer alignment time. The SF155 uses the same lightweight wafer stage as the SF150, but minimizes stage settling time to further boost system throughput. These recent design optimizations enable the SF155 to deliver more than 200 wafers (300 mm) per hour. NSR-SF155 (resolution ≦ 280 nm).ドキュメント
ドキュメントなし
NIKON
NSR-SF155
カテゴリ
Steppers & Scanners
最終検証： 19日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
147530
ウェーハサイズ：
12"/300mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
i-Line Wide-Field Stepper構成
構成なしOEMモデルの説明
i-Line The NSR-SF155 is the seventh generation SF system. The SF155 design incorporates the groundbreaking Skyhook platform of the SF150 system, but includes key performance enhancements. Like the SF150, the SF155 uses optimized load and unload positioning to reduce wafer exchange time, along with increased alignment processing speed to shorten wafer alignment time. The SF155 uses the same lightweight wafer stage as the SF150, but minimizes stage settling time to further boost system throughput. These recent design optimizations enable the SF155 to deliver more than 200 wafers (300 mm) per hour. NSR-SF155 (resolution ≦ 280 nm).ドキュメント
ドキュメントなし