説明

Details Attached

構成

Magnification 1/5 Reduction Light-Source i-Line(365nm) Resolution 0.4um Variable Lens NA 0.30 ~ 0.45 Low NA lens, Viriable Exposure Filed Size 22mm * 22mm Control Bellows Lens Adjust Micrometer PC System Hardware Type NIKON NEST UPS System No Software Version MCSV 3.46D OCSV GOCS 3.45Q Tool 3.46 Reticle Microscope Variable / Fixed Variable Alignment Sensor LSA Yes FIA Yes LIA No TTLFC2 Yes Measure Software Yes Illumination System Interferometer System LAMP 2.5Kw Hg Lamp Illumination SHRINC 4 Wafer Stage 5517CN05 Reticle Stage 5517CN05 Focus System Single / Multi Focus Multi Focus ( AF system ) Leveling System Normal / Table Table Leveling Wafer Loader Wafer Size 8 inch Wafer OF / Notch Type Notch Type1 / Type2 / Type3 Type3 Wafer Holder Type Ring Type Wafer Cassette 2 Cassette Wafer IN-Line Left In-Line Wafer Alignment LSA, LIA, FIA Wafer Edge Exposure No Reticle Loader Reticle Size 6 inch Normal / SMIF Type Nomal Type Library / SLOT 3 Lib. / 30 Slot Barder Reader Yes Particle Checker No Control Rack Type Left Type Cable Length Normal Signal Tower 3 Color / 4 Color Type No Chamber Air Conditioner Sendai Model S25 Temp. Controller Sendai Model S25 Refrigerant HFC-R407C / FC-77 Single / CVCF NEMA Single Electrical Power Spec 200/208~V, 50/60Hz, 3-Phase (BATC/CATC/LLTC) 19.0°C / 19.0°C / 19.0°C