説明

Pellicle Mounting System

構成

· Used in mask production line. · Tool consists of; a pressure-controlled flow bench chamber, an automated SMIF POD factory interface, a toolbox unit, a reticle gripper assembly, a studs loader jig, an epoxy dispense unit, and a control panel. · A pressure-controlled flow bench chamber: Consists of FFUs to facilitated steady stated down flow stream accompanied by grated flooring at the toolbox level. Exhaust unit enables recirculation of the air back to FFU. · Automated SMIF POD factory interface: Where SMIF POD is loaded to transfer reticles to toolbox unit for studs mount treatment. · Toolbox unit consists of; two cameras, top cover, four stud holder assembly modules with capability to move along X, Y, Z and Rz (rotation around Z) axis to align with reticle, four heater block assembly (to modulate epoxy curing time). This is the main unit where facilitates studs mount treatment. · Reticle gripper assembly: Is used to transfer reticles to toolbox unit and back to SMIF POD factory interface. · Studs loader jig: Is used to pre-align studs in correct orientation to be transferred to stud holder assembly modules. · Epoxy dispense unit: Is used to calibrate epoxy deposition amount on each studs. This unit has functional settings to accommodate epoxy viscosity variation as a function of time. · Control panel: Facilitates software interface to navigate through studs mount sequences (start/end process). · SFT-100 is a semi-automated tool, where operator performs studs transfer and reticle movement to toolbox prior to studs mount treatment. Operator then sends mount command through control panel to initiate the process. · Additional details available upon request.