説明
DISCO DTU1531 Water Temperature Control Unit Manufacturer: DISCO Model: DTU1531 Equipment Type: Water Temperature Control Unit Application: Spindle Coolant / Grinding Water Temperature Range: 20–25°C (Spindle Coolant) Temperature Accuracy: Within ±1°C Cooling Capacity: 1.5 kW / 6.3 kW Heating Capacity: 12.5 kW (Grinding Water) Flow Rate: 15 / 25 L/min Dimensions (W × D × H): 330 × 1,550 × 875 mm Weight: Approx. 280 kg (when full) Designed for temperature control of spindle coolant and grinding water in semiconductor wafer processing equipment.構成
構成なしOEMモデルの説明
Discontinued Mar. 2020ドキュメント
ドキュメントなし
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DISCO
DTU1531
カテゴリ
Support Equipment
最終検証： 8日前
主なアイテムの詳細
状態：
Used
稼働ステータス:
Deinstalled
製品ID：
153597
ウェーハサイズ：
不明
ヴィンテージ：
2007
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
DISCO DTU1531 Water Temperature Control Unit Manufacturer: DISCO Model: DTU1531 Equipment Type: Water Temperature Control Unit Application: Spindle Coolant / Grinding Water Temperature Range: 20–25°C (Spindle Coolant) Temperature Accuracy: Within ±1°C Cooling Capacity: 1.5 kW / 6.3 kW Heating Capacity: 12.5 kW (Grinding Water) Flow Rate: 15 / 25 L/min Dimensions (W × D × H): 330 × 1,550 × 875 mm Weight: Approx. 280 kg (when full) Designed for temperature control of spindle coolant and grinding water in semiconductor wafer processing equipment.構成
構成なしOEMモデルの説明
Discontinued Mar. 2020ドキュメント
ドキュメントなし