説明
• High throughput due to fast cycling, load-lockdesign • Better reproducibility and higher yields because of complete programmed sequencing • Improved step coverage with 2R source-to-substrate spacing • Single dome for lift-off processes • Minimized EIB source and substrate heater contamination since lower chamber is isolated • Clean, convenient operation in laminar flow hood because of low profile construction • Canted-dome planetary fixturing possible in full capacity chamber • Manual semiautomatic or fully automatic operation due to modular systems designs • Multimetal deposition capability with optional sources Temescal Technical Engineering Services (T.E.S.) TES FC-1800 Load Locked E-Beam Evaporator構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし
カテゴリ
Thermal Evaporators
最終検証： 19日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
138625
ウェーハサイズ：
4"/100mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
FERROTEC / TEMESCAL
FC 1800
カテゴリ
Thermal Evaporators
最終検証： 19日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
138625
ウェーハサイズ：
4"/100mm
ヴィンテージ：
不明
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
• High throughput due to fast cycling, load-lockdesign • Better reproducibility and higher yields because of complete programmed sequencing • Improved step coverage with 2R source-to-substrate spacing • Single dome for lift-off processes • Minimized EIB source and substrate heater contamination since lower chamber is isolated • Clean, convenient operation in laminar flow hood because of low profile construction • Canted-dome planetary fixturing possible in full capacity chamber • Manual semiautomatic or fully automatic operation due to modular systems designs • Multimetal deposition capability with optional sources Temescal Technical Engineering Services (T.E.S.) TES FC-1800 Load Locked E-Beam Evaporator構成
構成なしOEMモデルの説明
提供なしドキュメント
ドキュメントなし