説明
Thermal Evaporator構成
Denton evaporator (DV-502C) is equipped with cryo-pump and diagnostic apparatus: 14” dia. by 18” high Pyrex bell jar and a stainless steel eight port. Upside down rotary omni substrate holder. Electrical requirement: 208 V, 4 wire, 60 amp with ground and neutral Air requirement: 80 to 120 psi at 8 C.F.M. clean/ dry Water requirement: 7 G.P.M. at 75 to 85F Pumping system: Cryo-pump (CTI 100) and mechanical pump (Alcatel 2008: two- stage, direct drive, 7 C.F.M.) Vacuum gauges (pressure ranged from micron to atmosphere) Gas controller: Brooks Instruments gas flow controller (from 0 to 100 sccm of gas flow) System controller: microprocessor based controller Sources: DVI Minigun and CC-100 Ion Source. The resistance source is a 2 KW source capable of 500 A at 5 V or 200 A at 10 V.OEMモデルの説明
提供なしドキュメント
ドキュメントなし
DENTON VACUUM
DV 502C
検証済み
カテゴリ
Thermal Evaporators
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
21629
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
DENTON VACUUM
DV 502C
カテゴリ
Thermal Evaporators
最終検証： 60日以上前
主なアイテムの詳細
状態：
Used
稼働ステータス:
不明
製品ID：
21629
ウェーハサイズ：
不明
ヴィンテージ：
不明
Have Additional Questions?
Logistics Support
Available
Money Back Guarantee
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
Thermal Evaporator構成
Denton evaporator (DV-502C) is equipped with cryo-pump and diagnostic apparatus: 14” dia. by 18” high Pyrex bell jar and a stainless steel eight port. Upside down rotary omni substrate holder. Electrical requirement: 208 V, 4 wire, 60 amp with ground and neutral Air requirement: 80 to 120 psi at 8 C.F.M. clean/ dry Water requirement: 7 G.P.M. at 75 to 85F Pumping system: Cryo-pump (CTI 100) and mechanical pump (Alcatel 2008: two- stage, direct drive, 7 C.F.M.) Vacuum gauges (pressure ranged from micron to atmosphere) Gas controller: Brooks Instruments gas flow controller (from 0 to 100 sccm of gas flow) System controller: microprocessor based controller Sources: DVI Minigun and CC-100 Ion Source. The resistance source is a 2 KW source capable of 500 A at 5 V or 200 A at 10 V.OEMモデルの説明
提供なしドキュメント
ドキュメントなし