説明
説明なし構成
▪TFMS version: V3.31a7 based on DOS ▪Measurement tool : BPR, BPE, VAS BPR - Beam Profile Reflectometry : still the best way to characterize dielectric films BPE - TWI patented Beam Profile Ellipsometer VAS(Visible Spectroscopy) : 470-800 nm ▪SBC boardwithCPU Pentium Ⅲ 600 MHz ▪Cognex 3000 ▪Overhauled all systems and Robot, Controller(ESC200)OEMモデルの説明
The Therma-Wave Opti-Probe 2600 is a metrology system that supports Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE) modes. A 675 nm thermoelectrically cooled diode laser is used to establish the optical parameter and in spectrometry mode, a visible 450 to 840 nm tungsten halogen lamp is used. The system integrates BPR, BPE, and Spectrometry to further expand its measurement capabilities.ドキュメント
ドキュメントなし
カテゴリ
Thin Film / Film Thickness
最終検証： 5日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
146823
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
同様のリスト
すべて表示
KLA / THERMA-WAVE
OP-2600
カテゴリ
Thin Film / Film Thickness
最終検証： 5日前
主なアイテムの詳細
状態：
Refurbished
稼働ステータス:
不明
製品ID：
146823
ウェーハサイズ：
6"/150mm, 8"/200mm
ヴィンテージ：
1997
Logistics Support
Available
Transaction Insured by Moov
Available
Refurbishment Services
Available
説明
説明なし構成
▪TFMS version: V3.31a7 based on DOS ▪Measurement tool : BPR, BPE, VAS BPR - Beam Profile Reflectometry : still the best way to characterize dielectric films BPE - TWI patented Beam Profile Ellipsometer VAS(Visible Spectroscopy) : 470-800 nm ▪SBC boardwithCPU Pentium Ⅲ 600 MHz ▪Cognex 3000 ▪Overhauled all systems and Robot, Controller(ESC200)OEMモデルの説明
The Therma-Wave Opti-Probe 2600 is a metrology system that supports Beam Profile Reflectometry (BPR) and Beam Profile Ellipsometry (BPE) modes. A 675 nm thermoelectrically cooled diode laser is used to establish the optical parameter and in spectrometry mode, a visible 450 to 840 nm tungsten halogen lamp is used. The system integrates BPR, BPE, and Spectrometry to further expand its measurement capabilities.ドキュメント
ドキュメントなし